Our AI deep learning model was meticulously trained on extensive datasets, encompassing a broad spectrum of sensor data from semiconductor production equipment. This training enabled the model to master the recognition of standard operational patterns and to accurately identify deviations indicative of potential failures. Upon detecting an anomaly, the model not only estimated the time until potential failure but also conducted a thorough analysis to ascertain the root cause of the deviation. This dual-capability approach allowed for a more nuanced understanding of equipment behavior, facilitating preemptive maintenance strategies.